BOC Edwards QDP80 Dry Semiconductor Vacuum Pump
Used BOC Edwards QDP80 Dry Semiconductor Vacuum Pump
Manufacturer: BOC Edwards
Voltage: 208/360 volt, 60 Hz
Discription: Edwards QDP-80 Dry Vacuum Pump is a four-stage, positive displacement rotary pump. These “Dry Pumps” are ideal for the corrosive enviroment of semiconductor processing. The applications range from light duty loadlock and sputtering to demanding processes including plasma etch, LPCVD, PECVD, and MOCVD.